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plasma-assisted activated CVD (CVD — chemiclal vapor deposition); plasma-CVD (CVD — chemiclal vapor deposition) | |||
plasma-enhanced CVD | |||
plasma chemical vapor deposition | |||
plasma enhanced chemical vapor deposition | |||
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plasma enhanced chemical vapour deposition (Belllka) |
плазмохимическое осаждение из паровой фазы: 1 phrase in 1 subject |
Microelectronics | 1 |