notch/flat

Инструкция по эксплуатации машины для проверки полупроводниковых пластин

1. The machine can perform a pre-scan to locate the notch or flat. The image displays with the notch/flat at 0 degrees (facing downward).

Choosing zero degrees directs the software to perform a flat find or notch find operation.

2. If the flat/notch find option was used during the scan, then the center of the flat or notch is placed at zero degrees.

3. In the event of a notch/flat finding failure, scan the wafer anyway.  Results can be valid but the orientation of the notch or flat are unknown.

4. In the Polar view, the image file is reconstructed to provide a true perspective of the sample. The Polar view displays the data in the form of a wafer. If the flat/notch find option was used during the scan, then the center of the flat or notch is placed at zero degrees.Otherwise, zero degrees on the wafer is toward the measurement head.

Спасибо

Flat - основной базовый срез

Фото двух элементов сразу (notch - снизу, flat - сверху)