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link 13.12.2009 12:52 |
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Subject: resolution of the Optical Pens. Контекст: In fact, for all the profilers, the table below is referring to the resolution of the XY stages, which the resolution/accuracy of the tables is critical for our scanning technique. The resolution of the Optical Pens refers to the ability to distinguish features, however the accuracy refers to their ability to measure.... Интересущее предложение: In terms of metrology it is better to look at the accuracy specification, however we can still “resolve” features down to the resolution of the Optical Pens (что-то меня терзают смутные сомнения)... Заранее Спасибо! |
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