 |
| |||
| medium vacuum (10 2 – 10-1 Па); moderate vacuum (10 2 – 10-1 Па) | |||
| medium vacuum (10(up 2)-10-1 Па) | |||
| medium vacuum; moderate vacuum (1E+2 – 1E-1 Па) | |||
|
| |||
| medium vacuum (10 2 – 10-1 Па); moderate vacuum (10 2 – 10-1 Па) | |||
| medium vacuum (10(up 2)-10-1 Па) | |||
| medium vacuum; moderate vacuum (1E+2 – 1E-1 Па) | |||