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оптическая разность хода stresses
el.	optical-distance difference; optical-length difference; optical-path difference
met.	difference in optical path
polym.	optical retardation
silic.	difference of optical path
tech.	optical distance difference; optical length difference; optical path difference

оптическая разность хода: 2 phrases in 2 subjects

Metrology	1
Nanotechnology	1