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газофазное осаждениеstresses
nano GPD (MichaelBurov); gas-phase deposition (MichaelBurov); vapor deposition
semicond. chemical vapor deposition
газофазное осаждение: 146 phrases in 6 subjects
Abbreviation1
Lasers10
Makarov1
Nanotechnology130
Pharmacy and pharmacology1
Semiconductors3

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