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| electron-beam lithography | |||
| e-beam lithography; EB lithography; electron lithography | |||
| электронная литография: 23 phrases in 9 subjects |
| Electronics | 4 |
| General | 2 |
| Mass media | 2 |
| Microbiology | 2 |
| Microelectronics | 2 |
| Nanotechnology | 7 |
| Radiolocation | 2 |
| Scientific | 1 |
| Technology | 1 |