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| AFM-based lithography; AFM lithography; atomic force microscope-based lithography; atomic force microscope lithography | |||
| литография с применением атомного силового микроскопа: 3 phrases in 1 subject |
| Nanotechnology | 3 |
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| |||
| AFM-based lithography; AFM lithography; atomic force microscope-based lithography; atomic force microscope lithography | |||
| литография с применением атомного силового микроскопа: 3 phrases in 1 subject |
| Nanotechnology | 3 |