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Terms
for subject
Microelectronics
containing
deviation
|
all forms
|
exact matches only
English
German
detection of process
deviations
Nachweis von Prozeßabweichungen
deviation
from planarity
Nichtplanarität
deviation
of the photoresist thickness from the mean value
Abweichung der Fotoresistdicke vom Mittelwert
focal plane
deviation
Fokusebeneabweichung
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